[labnetwork] dealing with photoresist fumes

[Paolini, Steven]

Nathanael,
  If you can smell the fumes, it’s not working. Try reducing the work opening which will increase the velocity of the exhaust.
Regards,
  Steve

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nathanael Sieb
Sent: Monday, April 16, 2018 12:32 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] dealing with photoresist fumes


Hi all,

I'm curious how the different labs out there deal with photoresist safety.  I know that the fumes can be toxic, but it is difficult to deal with completely.  We have all of our spin coaters under a canopy exhaust that captures a lot of the fumes, but you can still smell it.  Do others put the coaters in a fume hood?  Perhaps use respirators?  Or is it not that big of a concern if you capture most of it?

Thanks,

Nathanael

________________________________
Nathanael Sieb
Director of Operations and Administration


4D LABS, Simon Fraser University    8888 University Drive, Burnaby, B.C. V5A 1S6

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