[labnetwork] dealing with photoresist fumes
Nava Ariel-Sternberg
na2661 at columbia.edu
Tue Apr 17 08:19:52 EDT 2018
Hi Nathanael,
Our spinners are inside fume hoods and we also added an exhaust point above the fridge where the photoresists are stored as past experience showed that there was bad smell just by opening the resist fridge.
The nose is a very sensitive detector but it’s not an accurate one so it’s hard to tell how much of the fumes are captured or not based on what you wrote… Consulting EH&S as was suggested here sounds like a good idea.
Thanks,
Nava
Nava Ariel-Sternberg, Ph.D.
Director of CNI Shared Facilities
Columbia University
530 w120th st., NY 10027
Room 1015/MC 8903
Office: 212-854-9927
Cell: 201-562-7600
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nathanael Sieb
Sent: Monday, April 16, 2018 12:32 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] dealing with photoresist fumes
Hi all,
I'm curious how the different labs out there deal with photoresist safety. I know that the fumes can be toxic, but it is difficult to deal with completely. We have all of our spin coaters under a canopy exhaust that captures a lot of the fumes, but you can still smell it. Do others put the coaters in a fume hood? Perhaps use respirators? Or is it not that big of a concern if you capture most of it?
Thanks,
Nathanael
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Nathanael Sieb
Director of Operations and Administration
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
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