[labnetwork] 回覆: Leybold turbo pump controller

[Rinehart, Sean M]

I’ve heard of at least a couple other instances where an obsolete leybold MAG.DRIVE controller has failed and no one can repair it. It seems endemic to their older analog pumps. That said, I haven’t heard anything bad about digital models, and I think my analog MAG.DRIVE controller ran over fifteen years before failing, which isn’t a bad lifetime.

Regarding other pumps I usually go with vendor spec, but lately I’ve been moving to replace some wet pumps with dry/scroll options on our older (20+ years) equipment in an effort to save time on maintenance and money on fomblin oil.

Best regards,

Sean Rinehart
Research Engineer – Plasma and Metrology Systems
Birck Nanotechnology Center 2287B | 765.496.9189




From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kevin Owen
Sent: Friday, August 17, 2018 11:58 AM
To: XIN GUO <sguo18 at yorku.ca>
Cc: Fab Network <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] 回覆: Leybold turbo pump controller

Shane,

My guess is they couldn't strike a contract with Leybold to get a good deal on the pumps. Because I also know vendors that exclusively use Leybold pumps. In my personal experience, I can't say I've had significantly more or significantly fewer "bad" experiences with any particular pump vendor (although the same can not be said for refurbishment companies).

Generally, I take the vendor recommendation for high vacuum pumps (turbos, cryos, etc), but request a specific backing/roughing pump, since we have standardized those at the LNF. The vendor should be able to provide the pumping capacity requirement and you can choose based on that (we have standardized to 2 pumps, one big, one small, and choose the one that meets/exceeds the requirement from the vendor). If you don't have anything standardized, I would just go with the recommendation of the vendor, although if they have several options I might see if one of them matches an existing piece of equipment. For us, this is primarily intended to reduce the number of on-site spares we need.

-Kevin

On Fri, Aug 17, 2018 at 9:01 AM, XIN GUO <sguo18 at yorku.ca<mailto:sguo18 at yorku.ca>> wrote:
Hi Colleagues,

My question might not be quite related to this topic but I hope to get some feedback.

We are considering to acquire a PECVD and RIE. I saw some buyers explicitly exclude Leybold pumps in their requirements. I am open to all suppliers but it does seem that Leybold pumps may have more issues than other reputable suppliers. Or, maybe I just got a wrong impression. Anyway, I do not mean to be bias on any supplier.

Btw, any rule of thumb for choosing pumps for cleanroom equipment?

Thanks

Shane



On Fri, Aug 17, 2018 at 8:37 AM Wing Leong CHUNG <mfcchung at ust.hk<mailto:mfcchung at ust.hk>> wrote:

Dear all,



I would like to express my apperciation to the replies from network members, they really give me many valuable suggestions and information regarding to my problem.



With Many Many Thanks

Jeff Chung

________________________________
寄件者: Wing Leong CHUNG
寄件日期: 2018年8月16日 15:32
收件者: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
主旨: Leybold turbo pump controller


Dear network members,



We have two turbo pump controllers (Mag Drive 1000, to drive MAG 900 turbo pump) out of order. It shows "Bearing Sensor" "Levitation Fail" onto the display. We swarp a good controller to the system, no error message appear. I guest the fault is come form the controller itself. However, I contact with Leybold but they said this model is obsoleted, no service can be provide further.



Is there any suggestion of company can provide service to repair the controllers?


Jeff Chung
Engineer
Nanosystem Fabrication Facility (NFF) of Hong Kong University of Science and Technology (HKUST)
Cell: (852)-2358-7211
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--
Kevin Owen
Senior Engineer in Research
Operations Group, Lurie Nanofabrication Facility
University of Michigan
(734) 545-4014
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