[labnetwork] Yellow filters for litho room: what specs are out there?

[Beaudoin, Mario]

Dear Labnetworks community,

I'm in the process of renovating our cleanroom and want yellow filters 
that meet the specs of /Lithoprotect/, specifically, I want way less 
than 1% transmission below 500nm. /Lithoprotect/ (see link below) claims 
less than 0.001% transmission below about 475nm.  In our old cleanroom, 
we used to have traditional 1% yellow windows that turned out to be 
inadequate for our maskless lithography system.

https://www.microchemicals.com/technical_information/170823_Lithoprotect_Flyer_EN_Web.pdf

Does anyone know of a US supplier that offers similar product? On the 
other hand, does anyone know of products that are not quite as 
performing but still offer say 0.01% transmission below 500nm? We will 
be using 405nm and 365nm light with a traditional mask aligner and a 
maskless system.  We typically use AZ 5214E-IR and nLoF 2020 resists for 
down to 1um features; some users still use Shipley 1813 and we have 
another set of groups using SU-8 resists.  We're not committed to any 
supplier but do require tight performance.

I'm cc'ing our cleanroom manufacturer engineers in this thread.

Regards,

Mario

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