[labnetwork] Silicon Tetrachloride delivery

[Fouad Karouta]

Dear John,

We do use SiCl4 in our ICP etcher.
See below for answers to your questions.

Best regards and happy festive season to all,
Fouad Karouta

*************************************
Manager ANFF ACT Node
Australian National Fabrication Facility
Research School of Physics and Engineering
L. Huxley Building (#56), Mills Road, Room 4.02
Australian National University
ACT 2601, Canberra, Australia
Tel: + 61 2 6125 7174
Mob: + 61 451 046 412
Email: fouad.karouta at anu.edu.au<mailto:fouad.karouta at anu.edu.au>
http://anff-act.anu.edu.au/



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of John Nash
Sent: Thursday, 20 December 2018 6:52 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Silicon Tetrachloride delivery

Thank you all for the help with STS support a few weeks back.
.
We are currently installing and facilitizing a Plasma Therm APEX SLR ICP and it will be utilizing Silicon Tetra Chloride. This is our first time setting up a STC delivery system. I was wondering if someone would be willing to share how your source delivery system is set up. I have a few questions below to help start the conversation.


1.       Do you use an ampule, a bubbler or does it come in a compressed gas style bottle?

a.       Stainless Steel or Glass ampule?
Compressed gas style bottle. You do purchase an amount in kg, substance is liquid in cylinder

2.       Is the ampule or bubbler heated to maintain a constant vapor pressure?
The gas cylinder is not heated but be careful if placed outside without any temperature control

a.       If heated, to what temperature?

b.      What is your output pressure on the regulator? Not too sure but you mainly get the vapour pressure of SiCl4 at ambient temperature which below atmospheric pressure.

3.       Do you use a carrier gas? No

a.       Which gas do you use?

b.      What is your output pressure on the regulator?

4.       Are the gas delivery lines heated? - we are planning on using double wall SS tubing to deliver the STC to the tool from the gas box.
we are using single SS gasline and it is heated to 35°C at all time

5.       Any other input is greatly appreciated, especially if you believe I may have overlooked something
Our system supplier advises to pump the gasline after each usage/end of day, that will avoid jamming the MFC with liquid SiCl4 and ensure a greater lifetime of the MFC.

Also, is the exhaust line heated from the pump to the GRC as well as from the tool to the pump.
No

Thank you all in advance and have a Happy Holidays,

John C Nash
SMFL - Technician
Rochester Institute of Technology
Semiconductor & Microsystems Fabrication Laboratory
82 Lomb Memorial Dr.
Bldg. 17-2627
Rochester, NY 14623

585 478-3835 cell
john.nash at rit.edu<mailto:john.nash at rit.edu>
www.smfl.rit.edu<http://www.smfl.rit.edu>


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20181219/89cf6e89/attachment.html>