[labnetwork] Sputtering Galfenol (FeGa alloy)?

Tim Gilheart gilheart at rice.edu
Tue Jul 10 16:19:21 EDT 2018


Greetings all,

Glad to catch up with a number of you during the recent UGIM conference. 

I received a request for sputtering of Galfenol (an alloy of Fe and Ga, with up to 27% Ga), one of several uncommon alloys he’s discussed with me as he explores the right combination of magnetostriction and magnetic permeability for his application. (He’s already decided against Terfenol-D, a TbDyFe alloy that might be more problematic.) My user sent me this article about Galfenol, in case that’s useful: https://aip.scitation.org/doi/10.1063/1.1540130 <https://aip.scitation.org/doi/10.1063/1.1540130>

I was wondering if anyone had experience with introducing Ga to a shared multi-gun sputtering tool and/or any cautionary tales to share on the subject. 

For reference, our tool has been used for magnetic materials on occasion, so Fe is not really a concern.

Thanks,

-- 
Tim Gilheart, Ph.D.
Research Scientist - Nanofabrication Clean Room Manager,
Shared Equipment Authority (SEA), Rice University
Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu


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