[labnetwork] Sputtering Galfenol (FeGa alloy)?

[Mariusz Martyniuk]

We have both Ga and Fe in our sputter. Ga is in a “bucket” in horizontal position as it can melt and spill.

Cheers,
Marius

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Tim Gilheart
Sent: Wednesday, 11 July 2018 4:19 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Sputtering Galfenol (FeGa alloy)?

Greetings all,

Glad to catch up with a number of you during the recent UGIM conference.

I received a request for sputtering of Galfenol (an alloy of Fe and Ga, with up to 27% Ga), one of several uncommon alloys he’s discussed with me as he explores the right combination of magnetostriction and magnetic permeability for his application. (He’s already decided against Terfenol-D, a TbDyFe alloy that might be more problematic.) My user sent me this article about Galfenol, in case that’s useful: https://aip.scitation.org/doi/10.1063/1.1540130

I was wondering if anyone had experience with introducing Ga to a shared multi-gun sputtering tool and/or any cautionary tales to share on the subject.

For reference, our tool has been used for magnetic materials on occasion, so Fe is not really a concern.

Thanks,

--
Tim Gilheart, Ph.D.
Research Scientist - Nanofabrication Clean Room Manager,
Shared Equipment Authority (SEA), Rice University
Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu<mailto:gilheart at rice.edu>


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