[labnetwork] Experience on ICP-RIE
Chen, Jun
JUC48 at pitt.edu
Thu Jul 26 12:50:43 EDT 2018
Dear Colleagues,
We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and Plasma-Therm Apex SLR ICP.
Does anyone have experience on these systems? What’s the pros and cons? I would greatly appreciate for your feedback!
best,
Jun Chen, Ph.D.
Nanofabrication scientist,
Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh
3700 O'Hara Street, Pittsburgh, PA 15261
T: 412.383.3282
http://www.nano.pitt.edu/
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