[labnetwork] Experience on ICP-RIE

[DeVito, Richard]

Jun

we have systems from both manufacturers including an APEX SLR tool purchased less than 2 years ago
I can comment on my experience with both...you can call me in the office line to discuss
if you want. I am usually available from 8:45-9:30 and again around 12:00 -1:00

Rich DeVito
Principle Member Technical Staff
Group Leader Microfabrication Lab
Draper
555 Technology Square,
Cambridge, MA 02139
Phone:  617-258-3819
www.draper.com<http://www.draper.com/>



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen, Jun
Sent: Thursday, July 26, 2018 12:51 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Experience on ICP-RIE

Dear Colleagues,
We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and  Plasma-Therm Apex SLR ICP.
Does anyone have experience on these systems? What's the pros and cons?  I would greatly appreciate for your feedback!

best,

Jun Chen, Ph.D.
Nanofabrication scientist,
Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh
3700 O'Hara Street, Pittsburgh, PA 15261
T: 412.383.3282
http://www.nano.pitt.edu/


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