[labnetwork] Ru deposition

[Matthew Moneck]

Hi Nava,

We have done a lot of Ru sputtering over the years.  Most of our films are for magnetic applications and tend to be thin, ranging from a few angstroms to a few tens of nanometers.  We have had no issues in these cases.  In cases where we've gone thicker (>100nm), we have had some issues with stress-induced cracking of the films at times, although, we were able to resolve the problem with proper choice of deposition conditions.

Best Regards,

Matt

--
Matthew T. Moneck, Ph.D.
Executive Manager, Carnegie Mellon Nanofabrication Facility
Electrical and Computer Engineering | Carnegie Mellon University
5000 Forbes Ave., Pittsburgh, PA 15213-3890
T: 412.268.5430
F: 412.268.3497
www.ece.cmu.edu<http://www.ece.cmu.edu>
nanofab.ece.cmu.edu

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of DeVito, Richard
Sent: Thursday, July 26, 2018 4:18 PM
To: Nava Ariel-Sternberg <na2661 at columbia.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Ru deposition

Nava,

We have e-beam evaporated it for contacts here. There are no toxicity issue I know of..its inert like platinum I believe.
Beware of cracking crucibles on cool down....

RD

Rich DeVito
Principle Member Technical Staff
Group Leader Microfabrication Lab
Draper
555 Technology Square,
Cambridge, MA 02139
Phone:  617-258-3819
www.draper.com<http://www.draper.com/>




From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel-Sternberg
Sent: Thursday, July 26, 2018 2:06 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Ru deposition

Dear all,

Does anyone have experience with Ru deposition? E-beam or sputtering? Any safety or contamination concerns? Any recommendations?

Thanks,
Nava


Nava Ariel-Sternberg, Ph.D.
Director of CNI Shared Labs
CEPSR/MC 8903
530 west 120th st. NY
NY 10027
Office: 212-8549927
Cell: 201-5627600


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