[labnetwork] Interlocks - what do you use?

[Klomparens, Dylan L. (Fed)]

Hello everyone,


NIST has been using the hardware interlocks that were developed by Stanford, and compatible with Coral. This system has worked well for us for years, however we're starting to think about what a "next gen" interlock might look like. I would like to gather some information, to see what is available on the market, and what has worked well for others.


What interlocks do you use for your fab?

  *   Make & model
  *   Do you have a URL to find more information?


What has your experience been? Was your solution easy to customize? Did it meet all your requirements? Did you get any extra capability easily (such as data collection or sensors for monitoring the fab)?


Please let me know if you're interested in the final results, and I can email the final results of this research to you.


-- Dylan Klomparens

NIST NanoFab
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