[labnetwork] Interlocks - what do you use?

Mac Hathaway hathaway at cns.fas.harvard.edu
Mon Jul 30 16:29:23 EDT 2018


Hi Dylan,

At Harvard CNS, we use a 6-channel ethernet-connected relay, called the 
ADAM 6060 from Advantech.

Each of these goes into a custom electronics enclosure (the ICP) that we 
have built by a guy from labmanone.com.  These can send out either 12V 
(to power relays) or present "dry contacts" to internal equipment 
interlock circuits, to disable tools when no user is logged in.  The 
power relays either depower the relevant monitor (for a control PC), or 
they depower the entire system.

These have been impressively robust, although a firmware change/Java 
version change has rendered older units a bit tricky to control manually 
using stand-alone control apps... compatibility with our CLEAN system 
has never been an issue.

These have worked well for our purposes, in conjunction with our 
home-grown CLEAN system (similar to Badger/Coral/iLabs/etc.).  My only 
wish is that there was a 12-channel version, as we sometimes have to 
co-locate several ICP control boxes to get a sufficient number of 
control channels.


Mac

Mac Hathaway

Senior Process and Systems Engineer

Harvard Center for Nanoscale Systems

11 Oxford St.

Cambridge, MA02138

617-495-9012


On 7/30/2018 10:15 AM, Klomparens, Dylan L. (Fed) wrote:
>
> Hello everyone,
>
>
> NIST has been using the hardware interlocks that were developed by 
> Stanford, and compatible with Coral. This system has worked well for 
> us for years, however we're starting to think about what a "next gen" 
> interlock might look like. I would like to gather some information, to 
> see what is available on the market, and what has worked well for others.
>
>
> What interlocks do you use for your fab?
>
>   * Make & model
>   * Do you have a URL to find more information?
>
>
> What has your experience been? Was your solution easy to customize? 
> Did it meet all your requirements? Did you get any extra capability 
> easily (such as data collection or sensors for monitoring the fab)?
>
>
> Please let me know if you're interested in the final results, and I 
> can email the final results of this research to you.
>
>
> -- Dylan Klomparens
>
> NIST NanoFab
>
>
>
> _______________________________________________
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> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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