[labnetwork] Mechanical pump advice

[Kevin Owen]

Iulian,

We also have moved to standardized pumps for the vast majority of our tools
- a larger Ebara pump and a smaller Adixen pump (mostly for loadlocks),
both dry pumps. They were spec'd originally to meet/exceed the needs of our
existing equipment and we tested them first to verify better performance
and lifetime than our previous pumps. We have several spares and keep an
electronic log of the locations for all of them by serial number and track
accumulation. We send them directly to the vendor for service (Ebara and
Pfeiffer respectively), have had some issues in the past with other 3rd
party refurbishment companies. We have a few spare parts like the quick
disconnects for the facility water and other odds and ends that are easier
to just replace in house, but again, very few. We also do our best to spec
new equipment with the same model pumps.

-Kevin

On Tue, May 29, 2018 at 9:30 AM, DeVito, Richard <rdevito at draper.com> wrote:

> Iulian
>
> While they may not necessarily be  the cheapest we have chosen to go with
> Ebara for all our rough style pumps-dry pumps. This was in a lab wide
> effort to removal all oil pumps from the fab . Also, they have great added
> value in that we have a service contract for them to come in periodically
> and service all the pumps . We get a good deal on rebuilds as well.
> These days no one can justify someone full time to service or manage all
> these pumps so this was a a logical choice for us. We also don't have to
> stock any spare parts-just a few spare pumps.
>
> When we spec new tools they must come with a certain model  Ebara rough
> pump that is common to most of the large tools in the fab. In that way if
> one goes down it's a quick swap out with one of the spares we keep on hand.
>
> Having said all this, I am not sure if the service here will reflect the
> service where you are...?
>
>
> Best
>
>
> Rich DeVito
> Principle Member Technical Staff
> Group Leader Microfabrication Lab
> Draper
> 555 Technology Square,
> Cambridge, MA 02139
> Phone:  617-258-3819
> www.draper.com
>
>
>
> -----Original Message-----
> From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces@
> mtl.mit.edu] On Behalf Of Iulian Codreanu
> Sent: Friday, May 25, 2018 8:33 AM
> To: Fab Network <labnetwork at mtl.mit.edu>
> Subject: [labnetwork] Mechanical pump advice
>
> Dear Colleagues,
>
> Over the past four years I have been purchasing equipment for my lab and I
> did not have the knowledge or the bandwidth to direct the vendors to
> provide a certain make of mechanical pumps.
>
> I am working on building a stock of spare parts, pumps, etc and once again
> I am tapping into your vast knowledge and willingness to help. If you could
> share your recommendations on mechanical pumps brands, that would be very
> much appreciated.
>
> Thank you very much and have a wonderful Memorial Day weekend,
>
> Iulian
>
> --
> iulian Codreanu, Ph.D.
> Director of Operations, UD NanoFab
> 163 ISE Lab
> 221 Academy Street
> Newark, DE 19716
> 302-831-2784
> http://udnf.udel.edu
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
> ________________________________
>  Notice: This email and any attachments may contain proprietary (Draper
> non-public) and/or export-controlled information of Draper. If you are not
> the intended recipient of this email, please immediately notify the sender
> by replying to this email and immediately destroy all copies of this email.
> ________________________________
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>



-- 
Kevin Owen
Senior Engineer in Research
Operations Group, Lurie Nanofabrication Facility
University of Michigan
(734) 545-4014
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20180605/0e4b3d83/attachment.html>