[labnetwork] Rehabilitation of sputtering chamber with uncertain history

[Mark Weiler]

Hi Aaron,

Try Quantum Clean, they service many different types of process equipment.

http://www.quantumclean.com/Service

Best regards,

Mark




Mark Weiler
Fab Equipment & Facilities Manager
Carnegie Mellon Nanofabrication Facility
Electrical and Computer Engineering | Carnegie Mellon University
5000 Forbes Ave., Pittsburgh, PA 15213-3890<x-apple-data-detectors://3/1>
T: 412.268.2471<tel:412.268.5430>
F: 412.268.3497<tel:412.268.3497>
www.ece.cmu.edu<http://www.ece.cmu.edu/>
nanofab.ece.cmu.edu<http://nanofab.ece.cmu.edu/>

On Jun 9, 2018, at 4:02 PM, Aaron Hryciw <ahryciw at ualberta.ca<mailto:ahryciw at ualberta.ca>> wrote:

Dear colleagues,

Our open-access facility recently inherited an AJA Orion 5 sputtering system from the lab of a PI who had left the university.  While it has a number of nice features that would make it a welcome addition to our toolset (e.g., load locked, substrate heating, automated deposition control, etc.), it also has a somewhat uncertain history, due to inconsistent and/or missing record keeping in its previous lab.  We know for certain that it was used for many magnesium depositions, but there are also rumours of possible antimony and cadmium (!) depositions, albeit only a handful of times.

I am looking for advice on how to bring this system to a state where we can safely use and maintain it in the long term.  Given its uncertain history and possible toxic contents, we are wary of performing a physical chamber clean ourselves.  Are there service providers available to whom we could send the chamber and deposition hardware (guns, dark space shields, shutters, etc.) to get chemically or physically cleaned?  Is it feasible to forego cleaning altogether and just bury everything in a thick Ti layer?

We have a number of elemental analysis capabilities in house, so we should in the near future be able to have at least semi-quantitative data on what materials are on the chamber walls, but I thought I would poll the Labnetwork for general best practices on how to proceed.  Many thanks in advance.

Cheers,

 – Aaron




Aaron Hryciw, PhD, PEng

Fabrication Group Manager

University of Alberta - nanoFAB

W1-060 ECERF Building

9107 - 116 Street

Edmonton, Alberta

Canada T6G 2V4 Ph: 780-940-7938

www.nanofab.ualberta.ca<http://www.nanofab.ualberta.ca/>

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