[labnetwork] metals in a III-V oxidation furnace

Kurt Kupcho kurt.kupcho at wisc.edu
Wed May 2 16:22:02 EDT 2018


Hi all

Are there any concerns with allowing gold or other metals into a III-V material oxidation furnace like there is with metals in a Si thermal oxidation furnace?

Thank you


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Kurt Kupcho
Process Engineer/Safety Officer

WCAM
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ECB Room 3110
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E:  kurt.kupcho at wisc.edu<mailto:kurt.kupcho at wisc.edu>
T:  608-262-2982

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