[labnetwork] Need Schematic for Varian Vacuum Process Control 980-6100 for E-beam system
McWilliams, Scott
mcwilliamss at mail.smu.edu
Wed May 2 10:28:32 EDT 2018
Anyone know where I can purchase or find schematics for the Varian vacuum process controller 980-6100 for an E-beam deposition tool? I couldn't find any sites that had these schematics for sale or download.
Thanks, Scott
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