[labnetwork] Air-Showers in the Cleanroom- KAUST

[Robert M. HAMILTON]

Colleagues,

I think the pertinent question re: air showers has to do with what is being
done in a lab. If it is ULSI production where yields need to be in the 90%
+ than every level and technique for reducing particles needs evaluation.
For a research facility exploring or making devices devices such as a
university or government research lab and air shower makes no sense. In the
24 years the University of California Microlab operated, with a researcher
count in the thousands, we never had a complaint that airborne particle
counts prevented a research product from yielding enough devices to be
relevant. Also note we used Tyvek disposable garments, did not have an air
shower, shoe vacuum or other elaborations.

When one considers the environments within the tools, PVD, etch, furnaces
and lpcvd, Class 100 or better met every need.

Robert Hamilton,
Retired


Robert Hamilton
Mobile 510-325-7557 (my personal mobile)
E-mail preferred: bob at eecs.berkeley.edu


On Tue, May 1, 2018 at 8:06 PM, Abbie Gregg <agregg at abbiegregg.com> wrote:

> HI Team,
>
> We did not design air showers into the gowning room at KAUST’s Nanofab.
> Data taken in the 1990s through the 2000s indicated that air showers stir
> up particles from both street clothing and from street clothing under
> cleanroom garments, particularly dacron polyester cleanroom garments with
> conductive fibers woven into them. We have found that laminar downflow
> Class 100 (high to full HEPA coverage at 80 fpm) creates a downward sweep
> of particles shed by people and their clothing that is much more effective
> than air showers.
>
> Pausing at the stages of gowning to allow this “air washing” of particles
> to the floor should be part of the gowning process.
>
> This is the concept behind the original design and construction of the
> KAUST nanofab gowning room from 2008 through 2011.
>
> I don’t know what you are experiencing that makes you think you need air
> showers in the KAUST Nanofab? We would be curious to know….
>
> Best Regards,
>
>
>
>
>
> Abbie Gregg
>
> President
>
> Abbie Gregg, Inc. (KAUST Nanofab cleanroom design and construction
> supervision)
>
> 1130 East University Drive, Suite 105
>
> Tempe, Arizona 85281
>
> Phone 480 446-8000 x 107
>
> Cell 480-577-5083
>
> FAX 480-446-8001
>
> email agregg at abbiegregg.com
>
> website www.abbiegregg.com
>
>
>
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> *From:* labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces@
> mtl.mit.edu] *On Behalf Of *Ahad Syed
> *Sent:* Monday, April 30, 2018 7:57 PM
> *To:* labnetwork at mtl.mit.edu
> *Subject:* [labnetwork] Air-Showers in the Cleanroom
>
>
>
> Dear Colleagues,
>
>
>
> We have been conducting a feasibility study for installing air showers in
> our cleanroom at KAUST.
>
> Could you please share with us some info regarding your facilities?
>
>
>
> Cleanroom ISO 6 or 5 (class 1000 or 100)
>
> Area:
>
> Approximate number of users:
>
> Have installed air showers: (Y/N)
>
> Comments:
>
>
>
> Your responses are highly appreciated.
>
>
> Thanks,
>
> Ahad
>
>
>
> --
>
> Lead Scientist, Safety & Facility
> Nanofabrication Core Lab
>
> 4700 King Abdullah University of Science and Technology
> 0247 Building 3, Thuwal 23955-6900, Kingdom of Saudi Arabia
> Tel:+966 <+966> 12 808 2348
>
> Visit The Core Labs <https://corelabs.kaust.edu.sa/visitor-information>
>
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