[labnetwork] HF Vapour Setup

[Aebersold,Julia W.]

We have the SPTS Microetch HF Vapor System, but it does not use an electrostatic chuck.  Wafers sit on top of pins or we have a fixture that holds individual samples.

Cheers!

Julia Aebersold
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292
(502) 852-1572

http://louisville.edu/micronano/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Fouad Karouta
Sent: Sunday, May 20, 2018 11:00 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] HF Vapour Setup

Dear all,

We have an AMMT HF vapour setup for up to 4 " wafer size.
Recently we are experiencing problems not being able to apply a voltage on the electro-static chuck to hold the wafer. We tried to contact AMMT in Germany (2 emails and 3 phone calls talking with an administrator) but we never got any feedback/reply from an engineer.

Has anyone experience with HF vapour setup? I wonder if someone has established contacts with someone from AMMT.
Also has anyone good experience with other possible suppliers of HF vapour setup?

Thank you,
Fouad Karouta

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