[labnetwork] Sputtering LiPON

Chang, Long lvchang at Central.UH.EDU
Tue May 22 16:20:50 EDT 2018

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Hi All,

We have a new group that is interested in sputtering 1-10 microns of a ceramic named LiPON (Lithium Phosphorus Oxynitride). From my conversation with them so far, they know very little about what they need to do. Does anyone have experience with this material? Any concerns I should consider? What's the best way to process this material?

Thanks,
Long

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