[labnetwork] Sputtering LiPON

[JR Gaines]

Dear Long,

LIPON is the electrolyte used in solid-state thin film lithium batteries.  The patents go back to Dr. John Bates at the Oak Ridge National Laboratory in the early 90's.  The material is made by reactively sputtering Li3PO4, by RF, in pure N2 gas.  There are several papers out there on making this material as a thin film.   Our company makes the precursor target material, lithium orthophosphate, as a sputter target or evaporation materials.  I have made this ceramic for more than 20 years and supported most of the major research and commercial efforts in the area of solid state batteries.   

Let me know if you are interested in papers on the reactive deposition of Li3PO4 to form LIPON.

Best regards,

J.R.



JR Gaines | Technical Director of Education | Tel: +1 (412) 896-8402 | Cell: +1 (614) 446-2202 | Fax: +1 (412) 872-5046 | Email: jrg at lesker.com | http://www.lesker.com

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-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Chang, Long
Sent: Tuesday, May 22, 2018 4:21 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Sputtering LiPON

Hi All,

We have a new group that is interested in sputtering 1-10 microns of a ceramic named LiPON (Lithium Phosphorus Oxynitride). From my conversation with them so far, they know very little about what they need to do. Does anyone have experience with this material? Any concerns I should consider? What's the best way to process this material?

Thanks,
Long
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