[labnetwork] HF Vapour Setup

[Michael Hume]

We also have a Vapour HF setup but it does not include an electrostatic
chuck, the wafer is simply held in place by a set of drop in pins.

On Tue, May 22, 2018 at 1:04 AM, Frank Dirne - TNW <F.W.A.Dirne at tudelft.nl>
wrote:

> Idonus has a similar set-up.
>
> Recently we had a failure in the electrostatic chuck and after returning
> it to Idonus we had a repaired chuck within 7 working days.
>
>
>
>
>
> best regards / met vriendelijke groeten,
>
> Frank Dirne
>
>
>
> Managing Director Kavli Nanolab
>
> Delft University of Technology
>
> Lorentzweg 1, 2628 CJ Delft
>
> TNW (bldg 22) - room D121
>
> Phone: +31 (0)15 27 82357 / +31 614330507
>
> email: F.W.A.Dirne at tudelft.nl
>
>
>
> secretary: +31 (0)15 27 82898
>
> website: www.qn.tudelft.nl/KN
>
>
>
> [image: cid:BE01F5A2-838B-40F8-A7BA-0A109001FFB3]
>
>
>
> Fank Dirne
>
>
>
> *From:* labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces@
> mtl.mit.edu] *On Behalf Of *Fouad Karouta
> *Sent:* maandag 21 mei 2018 5:00
> *To:* labnetwork at mtl.mit.edu
> *Subject:* [labnetwork] HF Vapour Setup
>
>
>
> Dear all,
>
>
>
> We have an AMMT HF vapour setup for up to 4 “ wafer size.
>
> Recently we are experiencing problems not being able to apply a voltage on
> the electro-static chuck to hold the wafer. We tried to contact AMMT in
> Germany (2 emails and 3 phone calls talking with an administrator) but we
> never got any feedback/reply from an engineer.
>
>
>
> Has anyone experience with HF vapour setup? I wonder if someone has
> established contacts with someone from AMMT.
>
> Also has anyone good experience with other possible suppliers of HF
> vapour setup?
>
>
>
> Thank you,
>
> Fouad Karouta
>
>
>
> *************************************
>
> Manager ANFF ACT Node
>
> Australian National Fabrication Facility
>
> Research School of Physics and Engineering
>
> L. Huxley Building (#56), Mills Road, Room 4.02
>
> Australian National University
>
> ACT 2601, Canberra, Australia
>
> Tel: + 61 2 6125 7174
>
> Mob: + 61 451 046 412
>
> Email: fouad.karouta at anu.edu.au
>
> http://anff-act.anu.edu.au/
>
>
>
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>


-- 

-Michael.


*PLEASE NOTE MY PHONE NUMBER HAS CHANGED: 780-953-5081*


Michael Hume

Operations Manager

University of Alberta - nanoFAB

W1-060 ECERF Building

9107 - 116 Street

Edmonton, Alberta

Canada T6G 2V4
www.nanofab.ualberta.ca Ph: *780-953-5081* (New)*
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