[labnetwork] Hafnium oxide Ebeam evaporation

[James Kerwin]

Christophe,

Does it have to be ebeam deposition?

HfO2 is a pretty standard ALD process. Most ALD tools can do it at
reasonable temperatures with good conformality, if you supply the right
precursor.

Sincerely,

James Kerwin
Rice University
Cleanroom Support Technician


On Fri, Nov 9, 2018, 8:58 PM Christophe Clément <
christophe.clement at polymtl.ca wrote:

> Hello community,
>
> I’ve been asked to deposit Hafnium Oxide in our Ebeam evaporator, and I do
> not have any experience with this material, is it safe to evaporate it
> regarding chamber/clean room contamination?
>
> The tool we have does not have load lock and we evaporate mainly most
> metals and also metallic oxides. I’ve check KJL charts and HfO2 seems to be
> fair for Ebeam evaporation, if you can share your experience with this
> material that would be appreciated
>
>
>
> Many Thanks,
>
>
>
> Christophe
>
>
>
> *Christophe Clément*
>
> *Technicien laboratoire*
>
> Laboratoire de microfabrication (LMF)
>
> Groupe des Couches Minces (GCM) *www.gcmlab.ca <http://www.gcmlab.ca>*
>
> Ecole Polytechnique de Montréal www.polymtl.ca
>
> Département de génie physique
>
> * 2900 Boulevard Edouard Monpetit
>
> Pavillon JAB
> Campus de l'Université de Montréal
> Montréal (Québec) H3T 1J4
>
>
> 8 christophe.clement at polymtl.ca
>
> ( 514 340 4711
>
> Fax : 514 340 4711 # 2417
>
>
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