[labnetwork] Hafnium oxide Ebeam evaporation

[Christophe Clément]

Hello community, 

I’ve been asked to deposit Hafnium Oxide in our Ebeam evaporator, and I do
not have any experience with this material, is it safe to evaporate it
regarding chamber/clean room contamination? 

The tool we have does not have load lock and we evaporate mainly most metals
and also metallic oxides. I’ve check KJL charts and HfO2 seems to be fair
for Ebeam evaporation, if you can share your experience with this material
that would be appreciated

 

Many Thanks, 

 

Christophe

 

Christophe Clément

Technicien laboratoire

Laboratoire de microfabrication (LMF)

Groupe des Couches Minces (GCM)  <http://www.gcmlab.ca> www.gcmlab.ca

Ecole Polytechnique de Montréal  <http://www.polymtl.ca/> www.polymtl.ca

Département de génie physique 

* 2900 Boulevard Edouard Monpetit

Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4


8  <mailto:christophe.clement at polymtl.ca> christophe.clement at polymtl.ca

( 514 340 4711

Fax : 514 340 4711 # 2417 

 

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