[labnetwork] Photo Mask Cleaning

[Siva Penmetsa]

Dear All,

We are planning to upgrade our Photomask Cleaning process,
(currently using Acetone, IPA and Piranha).

Please let us know your recommendations on the solutions, materials,
scrubbing.
Any suggestions on the suppliers?

Thanks in advance,

With Regards,
Siva Penmetsa,
Technology Manager,
National Nano Fabrication Centre(NNfC),
Centre for Nano Science And Engineering(CeNSE),
Indian Institute of Science(IISc), Bangalore
<siva at cense.iisc.ernet.in>
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