[labnetwork] Photo Mask Cleaning

[Aebersold,Julia W.]

We use NMP to clean our photomasks, but would love to go maskless.


Cheers!


Julia Aebersold, Ph.D.

MNTC Cleanroom Manager

University of Louisville

2210 South Brook Street

Shumaker Research Building, Room 233

Louisville, KY  40292

(502) 852-1572

http://louisville.edu/micronano/<http://louisville.edu/micronano>


________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Siva Penmetsa <sivapenmetsapr at gmail.com>
Sent: Monday, November 19, 2018 4:43:34 AM
To: Fab Network
Subject: [labnetwork] Photo Mask Cleaning

Dear All,

We are planning to upgrade our Photomask Cleaning process,
(currently using Acetone, IPA and Piranha).

Please let us know your recommendations on the solutions, materials, scrubbing.
Any suggestions on the suppliers?

Thanks in advance,

With Regards,
Siva Penmetsa,
Technology Manager,
National Nano Fabrication Centre(NNfC),
Centre for Nano Science And Engineering(CeNSE),
Indian Institute of Science(IISc), Bangalore
<mailto:siva at cense.iisc.ernet.in>
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