[labnetwork] PECVD/RIE - One-piece aluminum chamber or welded stainless steel

[Xin (Shane) Guo]

Dear colleagues

We are going to buy an RIE/PECVD system. Some vendors offer one-piece aluminum chambers while others offer welded stainless steel.

I understand that one-piece metal is good for keeping the vacuum, but which is more important (one-piece aluminum vs. welded stainless steel), if we have to choose one configuration?

Any suggestions and insights are highly welcome.

Shane
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20181024/f85a4b89/attachment.html>