[labnetwork] PECVD/RIE - One-piece aluminum chamber or welded stainless steel
James P McVittie
mcvittie at stanford.edu
Thu Oct 25 15:12:26 EDT 2018
Xin,
One normally does not want a plasma in contact with a stainless steel chamber wall. Typically, there is a plasma potential of around 15V between the plasma and a grounded wall. Ion bombardment of the wall will result is some sputtering of the surface of the wall. Fe and Ni from SS can be a problem for Si devices.
There are several ways to get around sputtering from an SS chamber wall. These include using Al shields on the wall, using a magnetic electron reflector (alternating N/S magnets around the outside of the wall) or using a glass cylinder between the wall and the wafer. I hope this is helpful.
Jim
James (Jim) McVittie, Ph.D.
Senior Research Engineer
Electrical Engineering
Stanford University
336x Paul G. Allen Bldg
420 Via Palou Mall
Stanford, CA 94305
mcvittie at stanford.edu
650-725-3640
________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Xin (Shane) Guo <sguo18 at yorku.ca>
Sent: Wednesday, October 24, 2018 6:14 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] PECVD/RIE - One-piece aluminum chamber or welded stainless steel
Dear colleagues
We are going to buy an RIE/PECVD system. Some vendors offer one-piece aluminum chambers while others offer welded stainless steel.
I understand that one-piece metal is good for keeping the vacuum, but which is more important (one-piece aluminum vs. welded stainless steel), if we have to choose one configuration?
Any suggestions and insights are highly welcome.
Shane
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