[labnetwork] Handling of MF-319 Developer

Beaudoin, Mario beaudoin at physics.ubc.ca
Mon Oct 29 20:23:19 EDT 2018


This is also how we do it at our facility.  Safety glasses and nitrile 
glove (we're phasing out latex gloves but we're still using up our 
inventory) in the laminar flow vented wetbench (Microzone/DFMZ).  No 
extra PPE.

Mario



On 2018-10-29 2:34 PM, Aebersold,Julia W. wrote:
>
> At our facility we primarily use MF-319 developer in puddle processing 
> for most of photolithography processes for we do not have a track system.
>
> I am reviewing our PPE for use with this material.  Currently, all 
> clients wear safety glasses and nitrile gloves at our well ventilated 
> developer bench.  I am curious to know if additional PPE is utilized 
> by other facilities and or butyl gloves.
>
> Cheers!
>
> Julia Aebersold
>
> Manager, Micro/Nano Technology Center
>
> University of Louisville
>
> Shumaker Research Building, Room 233
>
> 2210 South Brook Street
>
> Louisville, KY  40292
>
> (502) 852-1572
>
> http://louisville.edu/micronano/
>
>
>
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