[labnetwork] CEE Spinner bowl liner

[Kevin Owen]

Gary,

We don't use the liners in our 200X spinners, but the only photoresists we
allow in those ones are acetone soluble, and users are trained to clean up
their mess when they finish (and we also check/clean them a couple times a
week). They're still quite clean after at least 5 years. On our CEE 100
spinner, we allow a wider variety of "spin-on" materials that aren't
necessarily soluble in acetone (including LOR, polyimide, some suspended
nanoparticles, etc). In this tool, I started lining the bowl with Stripaway
5900 from General Chemical Corp way back in, oh, probably 2012. It's sort
of a "paint on" goo that then dries in a few hours and you can peel it off
later. We replace it every couple of weeks as necessary. Still using the
same tub I bought back then. The one caveat I have is that while it is
resistant to acetone, it does not like NMP, so for certain materials, for
example polyimide which is typically suspended in that, users are required
to line the bowl with aluminum foil. I believe they don't list that variety
on their website, but if you contact them, they can probably help you out.
You may also want to ask if another one they have would work better for the
plastic bowl in the 200s (the 100 is a metal bowl). Finally, the other two
spinners (one for SU-8 and PDMS, the other for e-beam resists) have
historically been lined with aluminum foil, replaced as necessary. As far
as I know, this works for them, although those were not in my jurisdiction
so I can't personally speak to that.

-Kevin

On Fri, Sep 7, 2018 at 10:24 AM, Gary Olin <olinx034 at umn.edu> wrote:

> Dear Colleagues:
>
> Does anyone know of an aftermarket source of Spinner Bowl Liners for the
> Brewer Science CEE 200x?
>
> Here we have a bunch of spinners consuming many liners.   Looking for a
> second source due to cost.
>
> Thanks,
> Gary
>
>
> Gary Olin
> Equipment Maintenance
> Minnesota Nano Center
> University of Minnesota
> olinx034 at umn.edu
> (612) 625-9780
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>


-- 
Kevin Owen
Senior Engineer in Research
Operations Group, Lurie Nanofabrication Facility
University of Michigan
(734) 545-4014
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20180911/f4b41323/attachment.html>