[labnetwork] EDC from Laurell

[Shimon Eliav]

Hello everybody,

We are considering to purchase an EDC<http://www.laurell.com/spin-coater/?model=EDC-650-23> (Etch Develop Clean) spinner from Laurell to deal with Piranha cleaning of wafers, masks and small Si pieces. Someone have already experience with Piranha cleaning using this spinner?
Thanks in advance,

Shimon Eliav
The Hebrew University of Jerusalem
The Unit for Nano Fabrication (UNF)
Jerusalem - ISRAEL


From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of A. William (Bill) FLOUNDERS
Sent: Saturday, 3 August 2019 1:20
To: Vlahakis, James <James.Vlahakis at tufts.edu>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Dicing Saw Advice.....

Since this has become a poll of sorts:
Disco, 100's of users, highest quality, trouble free
Bill Flounders
UC Berkeley

On Thu, Aug 1, 2019 at 12:49 PM Vlahakis, James <James.Vlahakis at tufts.edu<mailto:James.Vlahakis at tufts.edu>> wrote:
Hi everyone, I’m hoping the group can provide some advice regarding dicing and dicing saws.

We have a refurbished (within the past 3yrs) MicroAutomation MA1006<https://engineering.tufts.edu/microfab/capabilities/MA1006Saw.htm> saw which requires significant time/resources to keep online. Unfortunately, it is underutilized, only 1-2 dicing jobs per month. With such poor bang-for-the-buck we’re considering alternatives -


  *   A different service provider – maybe our support is subpar?

For those who have similar tools, who maintains them? What are your results?

  *   Purchase a different, hopefully more reliable saw

For those with other saws, what do you have? Can you comment on reliability? Consumable costs? Ease of use?

  *   Remove the saw and do not replace it

Losing capabilities is suboptimal and perhaps sets a perilous precedent (we are university lab, none of our tools are justified *economically*). Have others done this? Can anyone recommend a source for dicing services – specifically for small, infrequent jobs?

  *   Other possibilities we haven’t considered?

I’m eager to hear various perspectives and experiences.

jim



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