[labnetwork] EDC from Laurell

Tue Aug 6 08:07:48 EDT 2019

I have used a Laurell spinner for cleans and acid etches. You have to make sure that the delivery system for your acids are Teflon coated otherwise any metal surfaces will be corroded. I would mount the spinner directly in to a fume hood and of course you wil need the proper waste drain for the material you are going to etch.

For piranha you cannot use a pressure delivery tank much too dangerous, you will need to have 2 tanks one for Sulfuric and one for peroxide and develop a ratio to get the proper mix at the wafer surface. Remember that the mix creates a lot of heat so process development will be key.

Good luck

Rick

Richard H. Morrison
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From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shimon Eliav
Sent: Tuesday, August 06, 2019 5:42 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] EDC from Laurell

Hello everybody,

We are considering to purchase an EDC<http://www.laurell.com/spin-coater/?model=EDC-650-23> (Etch Develop Clean) spinner from Laurell to deal with Piranha cleaning of wafers, masks and small Si pieces. Someone have already experience with Piranha cleaning using this spinner?
Thanks in advance,

Shimon Eliav
The Hebrew University of Jerusalem
The Unit for Nano Fabrication (UNF)
Jerusalem - ISRAEL

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of A. William (Bill) FLOUNDERS
Sent: Saturday, 3 August 2019 1:20
To: Vlahakis, James <James.Vlahakis at tufts.edu<mailto:James.Vlahakis at tufts.edu>>
Cc: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Dicing Saw Advice.....

Since this has become a poll of sorts:
Disco, 100's of users, highest quality, trouble free
Bill Flounders
UC Berkeley

On Thu, Aug 1, 2019 at 12:49 PM Vlahakis, James <James.Vlahakis at tufts.edu<mailto:James.Vlahakis at tufts.edu>> wrote:
Hi everyone, I’m hoping the group can provide some advice regarding dicing and dicing saws.

We have a refurbished (within the past 3yrs) MicroAutomation MA1006<https://engineering.tufts.edu/microfab/capabilities/MA1006Saw.htm> saw which requires significant time/resources to keep online. Unfortunately, it is underutilized, only 1-2 dicing jobs per month. With such poor bang-for-the-buck we’re considering alternatives -

  *   A different service provider – maybe our support is subpar?

For those who have similar tools, who maintains them? What are your results?

  *   Purchase a different, hopefully more reliable saw

For those with other saws, what do you have? Can you comment on reliability? Consumable costs? Ease of use?

  *   Remove the saw and do not replace it

Losing capabilities is suboptimal and perhaps sets a perilous precedent (we are university lab, none of our tools are justified *economically*). Have others done this? Can anyone recommend a source for dicing services – specifically for small, infrequent jobs?

  *   Other possibilities we haven’t considered?

I’m eager to hear various perspectives and experiences.

jim

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