[labnetwork] NO use for SiC oxidation and post-oxidation anneal

[Bill Kiether]

Hello,

We are looking to add capability to our oxidation furnaces, and have been
advised to use NO (nitric oxide) for SiC oxidation and post-oxidation
anneal steps. Doe anyone use NO in their labs for this process?  What are
the typical concentrations you have been using (usually with N2 as the
carrier gas)?  What type of new safety protocols/equipment did you add for
the use with NO?

Bill Kiether
NCSU Nanofabrication Facility
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