[labnetwork] Silicon to InGaAs selective wet etch

[Mike Young]

KOH-based etchant perhaps?

--Mike

On 2/2/2019 4:00 PM, McWilliams, Scott wrote:
>
> Hello All,
>
> I am looking for a wet etch that will etch sputtered silicon and not 
> etch InP or InGaAs.  I do not know the exact composition of the 
> InGaAs, but it is a zinc doped contact layer for a laser diode.  I did 
> try some published silicon etchants at various ratios (all at nominal 
> room temperature) of PAN etch, or acidic/nitride/HF, but they etched 
> the InGaAs a bit too fast.
>
> I could not find online any information about silicon to InGaAs 
> selectivity, I would appreciate any input if you have experience in 
> this (I’m trying to avoid dry etching this).
>
> Thank you,
>
> Scott McWilliams
>
> Lab Manager
>
> SMU
>
>
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-- 
Michael P. Young                        (574) 631-3268 (office)
Nanofabrication Specialist              (574) 631-4393 (fax)
Department of Electrical Engineering    (765) 637-3784 (cell)
University of Notre Dame                 mike.young at nd.edu
B-38 Stinson-Remick Hall
Notre Dame, IN 46556-5637

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