[labnetwork] Silane and Dichlorosilane Line Evacuation

[Bruce Tolleson]

Dear users of Silane and Dichlorosilane,
When your systems that use silane and dichlorosilane are not in use do you evacuate the lines going to the tool? We are looking for the best practices for gas line safety in a student environment microelectronic clean room.
The gas lines are wall mount or overhead coaxial stainless steel all welded lines with excess flow sensors.
What are you doing with you silane and dichlorosilane lines?
Thank you,

Bruce E. Tolleson
Rochester Institute of Technology
82  Lomb Memorial Drive, Bldg 17-2627
Rochester, NY 14623-5604
(585) 478-3836
[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]

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