[labnetwork] Sputter Fe

[Mark Weiler]

Hi Long,

I have sputtered iron extensively using an ion beam (IBS) in a UHV chamber.  I did not notice any adverse affects… Our chamber was well shielded with custom fit stainless steel shields, which were cleaned every 3 to 4 months.

Best,

Mark

Mark Weiler
Equipment & Facilities Manager
Claire and John Bertucci Nanotechnology Laboratory
Electrical and Computer Engineering | Carnegie Mellon University
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On Feb 21, 2019, at 22:17, Chang, Long <lvchang at central.uh.edu<mailto:lvchang at central.uh.edu>> wrote:

Hi All,

I have a user who's wants to sputter Fe in our UHV sputtering system. My director is worried about rust forming. Anyone have adverse experience with Fe I should consider before allowing its usage?

Thanks,
Long
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