[labnetwork] TiB2

[Fouad Karouta]

Dear all,

We have a sputter system with a large choice of targets and we exchange targets regularly depending on requests.
We have recently received a request to sputter TiB2. We couldn't find its SDS but that of TiB which shows some toxicity.

Has anyone used TiB2 in a sputter system and any thoughts/concerns about safety and possible contamination of the system?

Thanks,
Fouad Karouta

*************************************
Manager ANFF ACT Node
Australian National Fabrication Facility
Research School of Physics and Engineering
L. Huxley Building (#56), Mills Road, Room 4.02
Australian National University
ACT 2601, Canberra, Australia
Tel: + 61 2 6125 7174
Mob: + 61 451 046 412
Email: fouad.karouta at anu.edu.au<mailto:fouad.karouta at anu.edu.au>
http://anff-act.anu.edu.au/

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