[labnetwork] -|EXT|- Failure light on Turbotronik NT20

[WAITE Matthew]

Hi Kevin,

I've attached the NT20 manual.  With the FAILURE LED on and the #6 LOAD LED lit, this means that the turbo pump is over temperature.  Perform the usual checks - cooling flow, pressure, and no blockage or could be a current issue from the controller.


Matthew Waite
Aftermarket Sales

Oxford Instruments Plasma Technology
300 Baker Ave
Suite 150
Concord, MA 01742
Tel: +1 978-764-0741
plasma.oxinst.com







-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kevin M McPeak
Sent: Tuesday, July 2, 2019 7:51 PM
To: labnetwork at mtl.mit.edu
Subject: -|EXT|- [labnetwork] Failure light on Turbotronik NT20

Dear Colleagues,

The turbo pump controller (Leybold Turbotronik NT20)  on our Oxford ICP100 plasma etching tool is giving a Failure light, see attached image. I looked in the manual but all it mentions is pressing the stop button to clear the error. I tried that but the light stays red. I have also tried power cycling the machine (didn't help) and I checked all the fuses (all good there). I also reached out the Oxford and Leybold. Oxford said that it is very old and that they have limited experience. Leybold has not replied.

Does anyone on the list have experience with troubleshooting this turbo pump controller? The turbo pump itself is a Leybold 361C. I welcome tips on how best to troubleshoot this issue.

Regards,
Kevin

--
Kevin M. McPeak
Assistant Professor | LSU Dept. of Chemical Engineering
225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication

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