[labnetwork] Failure light on Turbotronik NT20
Eric Lim
eslim at mtl.mit.edu
Wed Jul 3 11:58:47 EDT 2019
Hi Kevin,
I have a manual for the NT340 controller, and in the troubleshooting
section it says that if the Failure LED is on, one of the LEDs in the
chain will be flashing to indicate the error. In this case it looks like
LED6 is on, which points to a problem with the turbo temp being too
high. Not sure if this is the same for the NT20. Maybe a failure of
the temperature switch?
When you press the stop button are you in local mode? If the controller
is in remote mode, you may need to send the stop command through the
software.
Eric Lim
tel.617-253-6897
fax.617-258-8500
room 39-215
On 7/2/2019 10:50 PM, Kevin M McPeak wrote:
> Dear Colleagues,
>
> The turbo pump controller (Leybold Turbotronik NT20) on our Oxford ICP100 plasma etching tool is giving a Failure light, see attached image. I looked in the manual but all it mentions is pressing the stop button to clear the error. I tried that but the light stays red. I have also tried power cycling the machine (didn't help) and I checked all the fuses (all good there). I also reached out the Oxford and Leybold. Oxford said that it is very old and that they have limited experience. Leybold has not replied.
>
> Does anyone on the list have experience with troubleshooting this turbo pump controller? The turbo pump itself is a Leybold 361C. I welcome tips on how best to troubleshoot this issue.
>
> Regards,
> Kevin
>
> --
> Kevin M. McPeak
> Assistant Professor | LSU Dept. of Chemical Engineering
> 225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication
>
>
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