[labnetwork] MA6 lamp life
Beall, James A. (Fed)
james.beall at nist.gov
Fri Jul 5 16:40:24 EDT 2019
We leave our MA6 on 24/7 and change the lamp (350W) every 650 hours. I think that was a manufacturer recommendation.
I was told long ago that turning the lamp off and on was the equivalent of 24 hours of lifetime.
Cold mirrors and parabolics are expensive and dealing with Hg cleanup after a lamp explosion is an issue to consider.
Best,
Jim
NIST Boulder Microfabrication Facility
________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Youry Borisenkov <yb2471 at columbia.edu>
Sent: Friday, July 5, 2019 9:58 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] MA6 lamp life
HI Everyone,
I have 3 quick questions about your policy for changing the UV-lamp on the MA6 (Karl Suss) mask aligners.
1. do you turn off the UV - power supply during nights and weekends? or just leave it on?
2. do you change the UV lamp on a regular basis (after 1 month or so)? or you monitor it's power and have a lower limit before you decide to change it? or you just wait for it to fail and then change it?
3. how often do you change the lamp?
Thanks and Happy July 4th
Youry
P.S.
You can use this template to reply):
1- Off/On
2- Change every ___ / wait for the power to decrease by ___ % / wait for it to fail
3- Every ___ month
We leave ours on 24/7
We change at approx. 650 hours
Youry Borisenkov, Ph.D.
Process Engineer at CNI Shared Labs
CEPSR/MC 8903
530 west 120th st. NY
NY 10027
Work 212-851-5688
Cell 646-592-1514
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