[labnetwork] MA6 lamp life

[Matthias Pleil]

Hello Youry,

1. We leave the lamp on all the time
2. Change the lamp when it drops to about 2.2mW/cm^2, using 365nm meter
3. Change about every six months or so.

New lamp is about 3.2mW/cm^2

Kind Regards,

Matthias Pleil, Ph.D.
Research Professor & Lecturer III of Mech. Eng - UNM
UNM MTTC Cleanroom Manager
PI - Southwest Center for Microsystems Education, Support Center for Microsystems Education
scme-nm.org, scme-support.org
(505)272-7157
________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Youry Borisenkov <yb2471 at columbia.edu>
Sent: Friday, July 5, 2019 9:58:44 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] MA6 lamp life


HI Everyone,



I have 3 quick questions about your policy for changing the UV-lamp on the MA6 (Karl Suss) mask aligners.

1. do you turn off the UV - power supply during nights and weekends? or just leave it on?

2. do you change the UV lamp on a regular basis (after 1 month or so)? or you monitor it's power and have a lower limit before you decide to change it? or you just wait for it to fail and then change it?

3. how often do you change the lamp?


Thanks and Happy July 4th

Youry


P.S.

You can use this template to reply):

1-      Off/On

2-      Change every ___ /  wait for the power to decrease by ___ % / wait for it to fail

3-      Every ___ month








Youry Borisenkov, Ph.D.

Process Engineer at CNI Shared Labs

CEPSR/MC 8903
530 west 120th st. NY
NY 10027

Work  212-851-5688

Cell  646-592-1514
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