[labnetwork] Gold Deposition over Chrome

Greg Allion grallion at ncsu.edu
Mon Jun 3 08:35:38 EDT 2019


Maybe I'm not understanding your process correctly, but couldn't you just
write the mask inverted, develop, evaporate your Au, lift-off, then Cr
etch?  The Au will act as a your mask then for the Ctr etch.
-Greg

On Fri, May 31, 2019 at 7:37 PM Nathanael Sieb <sieb at 4dlabs.ca> wrote:

> A similar interesting idea might be to use a fluoro-silane to make a
> fluorinated surface in the glass areas.  I've never tried it before for
> this application, but it might work.
>
> Thanks,
>
> Nathanael
> On 2019-05-31 3:40 a.m., Morrison, Richard H., Jr wrote:
>
> Here’s a crazy idea try vapor HMDS, it will react with the glass but not
> the Chrome and it might help. Gold does not really like to stick to glass
> how thick is the film?
>
>
>
> Rick
>
>
>
>
>
>
>
> *From:* labnetwork-bounces at mtl.mit.edu [
> mailto:labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu>] *On
> Behalf Of *Jim Carroll
> *Sent:* Thursday, May 30, 2019 4:24 PM
> *To:* labnetwork at mtl.mit.edu
> *Subject:* [labnetwork] Gold Deposition over Chrome
>
>
>
> Dear LabNetwork colleagues,
>
>
>
> We are trying to add a thin film of gold over patterned chrome on a
> standard photomask using e-beam evaporation.  We want the gold to
> preferentially adhere to the chrome while lifting off the glass.
>
>
> After a few tests, it appears that the gold sticks equally well to both
> the glass and chrome.  Ultrasonic agitation and swabbing do not selectively
> remove the gold from the glass while leaving it on the chrome.  Eventually,
> after enough pressure is applied with a swab, the gold releases from both
> the glass and chrome.
>
>
>
> Does anyone have a suggested approach?
>
>
> Thanks,
>
> Jim Carroll
> *PhotomaskPORTAL*
>
> *We help you make masks*
> (415) 448-6275
>
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