[labnetwork] Gold Deposition over Chrome

[Jim Carroll]

Hi Greg,

Thanks, that sounds like a viable option.  In this specific case, since we
already have patterned chrome masks, we're going to try the "“Reverse-side
exposure Lift-Off” process mentioned by Andrei near the beginning of the
thread, plus the addition of an anneal step to punch through the oxide
layer and improve adhesion.

Thanks,
Jim Carroll
*PhotomaskPORTAL*
*We help you make masks*
(415) 448-6275

   -
   <http://www.photomaskportal.com>



On Mon, Jun 3, 2019 at 2:49 PM Greg Allion <grallion at ncsu.edu> wrote:

> Maybe I'm not understanding your process correctly, but couldn't you just
> write the mask inverted, develop, evaporate your Au, lift-off, then Cr
> etch?  The Au will act as a your mask then for the Ctr etch.
> -Greg
>
> On Fri, May 31, 2019 at 7:37 PM Nathanael Sieb <sieb at 4dlabs.ca> wrote:
>
>> A similar interesting idea might be to use a fluoro-silane to make a
>> fluorinated surface in the glass areas.  I've never tried it before for
>> this application, but it might work.
>>
>> Thanks,
>>
>> Nathanael
>> On 2019-05-31 3:40 a.m., Morrison, Richard H., Jr wrote:
>>
>> Here’s a crazy idea try vapor HMDS, it will react with the glass but not
>> the Chrome and it might help. Gold does not really like to stick to glass
>> how thick is the film?
>>
>>
>>
>> Rick
>>
>>
>>
>>
>>
>>
>>
>> *From:* labnetwork-bounces at mtl.mit.edu [
>> mailto:labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu>] *On
>> Behalf Of *Jim Carroll
>> *Sent:* Thursday, May 30, 2019 4:24 PM
>> *To:* labnetwork at mtl.mit.edu
>> *Subject:* [labnetwork] Gold Deposition over Chrome
>>
>>
>>
>> Dear LabNetwork colleagues,
>>
>>
>>
>> We are trying to add a thin film of gold over patterned chrome on a
>> standard photomask using e-beam evaporation.  We want the gold to
>> preferentially adhere to the chrome while lifting off the glass.
>>
>>
>> After a few tests, it appears that the gold sticks equally well to both
>> the glass and chrome.  Ultrasonic agitation and swabbing do not selectively
>> remove the gold from the glass while leaving it on the chrome.  Eventually,
>> after enough pressure is applied with a swab, the gold releases from both
>> the glass and chrome.
>>
>>
>>
>> Does anyone have a suggested approach?
>>
>>
>> Thanks,
>>
>> Jim Carroll
>> *PhotomaskPORTAL*
>>
>> *We help you make masks*
>> (415) 448-6275
>>
>> ·         [image: Image removed by sender.]
>> <http://www.photomaskportal.com>
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