[labnetwork] special canisters of DES and TEOS for PECVD

[Fred Newman]

Hi Shane,

STREM sells these canisters:  https://www.strem.com/catalog/accessories.php

Best regards
Fred


On Fri, Jun 7, 2019 at 1:18 PM Xin (Shane) Guo <sguo18 at yorku.ca> wrote:

> Hi Colleagues,
>
> Does anyone know where to buy stainless steel canisters with control
> valves to supply DES and TEOS to PECVD? Some vendors sell DES in a bottle
> which cannot be connected to the PECVD.
>
> Any feedback is highly appreciated!
>
> Best
>
> Shane
>
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-- 
Fred Newman
Research Engineer
Washington Nanofabrication Facility (WNF)
University of Washington
Fluke Hall 115, Box 352143
office 206-616-3534
mobile 505-450-4447
fnewman at uw.edu
https://www.wnf.washington.edu/
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