[labnetwork] special canisters of DES and TEOS for PECVD

Xin (Shane) Guo sguo18 at yorku.ca
Fri Jun 7 12:16:13 EDT 2019


Hi Colleagues,

Does anyone know where to buy stainless steel canisters with control valves to supply DES and TEOS to PECVD? Some vendors sell DES in a bottle which cannot be connected to the PECVD.

Any feedback is highly appreciated!

Best

Shane

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