[labnetwork] special canisters of DES and TEOS for PECVD

[Fouad Karouta]

Hi Shane,
We have an Oxford PECVD with a TEOS module and first canister we purchased from Air Products in USA and the second time we used Pegasus in UK http://pegasuschemicals.com/
Hope this helps,
Fouad Karouta


On 8 Jun 2019, at 6:20 am, Xin (Shane) Guo <sguo18 at yorku.ca<mailto:sguo18 at yorku.ca>> wrote:

Hi Colleagues,

Does anyone know where to buy stainless steel canisters with control valves to supply DES and TEOS to PECVD? Some vendors sell DES in a bottle which cannot be connected to the PECVD.

Any feedback is highly appreciated!

Best

Shane

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