[labnetwork] special canisters of DES and TEOS for PECVD

[Ahad Syed]

Hello Shane,


We have an Oxford Instruments PlasmaLab100 with the TEOS module. We buy our TEOS canisters from Versum Materials. Our contact is


Ramos Alonso, Aida <Aida.RamosAlonso at versummaterials.com>



All the best,

Ahad

--
Nanofabrication Core Lab
4700 King Abdullah University of Science and Technology
0247 Building 3, Thuwal 23955-6900, Kingdom of Saudi Arabia
Tel:+966 12 808 2348
Visit The Core Labs<https://corelabs.kaust.edu.sa/visitor-information>
________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Xin (Shane) Guo <sguo18 at yorku.ca>
Sent: Friday, June 7, 2019 7:16 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] special canisters of DES and TEOS for PECVD

Hi Colleagues,

Does anyone know where to buy stainless steel canisters with control valves to supply DES and TEOS to PECVD? Some vendors sell DES in a bottle which cannot be connected to the PECVD.

Any feedback is highly appreciated!

Best

Shane



-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20190608/9b4c8a63/attachment.html>