[labnetwork] Cassette Loading Spinner/Developer Tools

[Shawn Wright]

Hi Everyone,

We’re currently looking at replacing our SUSS ACS200 cluster tool, it’s showing it’s age and SUSS no longer supports it for replacement parts.  It would be good to hear what people are running for automated spin coating and developing, especially any experience with reliability and vendor support.  Specifically we’re looking for tools that can do cassette loading for 4” and 6” wafers that can do vapor prime, photoresist spinning, bake, and aqueous develop.


Thanks for your help,
Shawn Wright
Lead Engineer in Research
Lurie Nanofabrication Facility
University of Michigan