[labnetwork] heat load of MA6 mask aligner and Oxford RIE 80

[Christian Pfluegl]

Dear colleagues,

We are planning to setup a Karl Suess MA6 maskaligner and a small Oxford RIE 80 in our facility.

Does anyone know what the heat loads of those systems are (both idling and operating)?

The Oxford manual says 1.5kW when idling but I am not sure how they arrive at such a high value when the RF is off.

Thanks,

Christian

Dr. Christian Pfluegl
Pendar Technologies LLC
tel.: (857) 413-9339
www.pendartechnologies.com


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