[labnetwork] heat load of MA6 mask aligner and Oxford RIE 80

[Perry M.G.]

Hi Christian,

Can you confirm age of RIE? At idle the PLC is the thing that kicks out the most heat. There's no other idle heat load i can think of and 1.5kw does seem a lot.


regards

Mike


________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Christian Pfluegl <pfluegl at pendar.tech>
Sent: 01 March 2019 15:01:04
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] heat load of MA6 mask aligner and Oxford RIE 80


Dear colleagues,



We are planning to setup a Karl Suess MA6 maskaligner and a small Oxford RIE 80 in our facility.



Does anyone know what the heat loads of those systems are (both idling and operating)?



The Oxford manual says 1.5kW when idling but I am not sure how they arrive at such a high value when the RF is off.



Thanks,



Christian



Dr. Christian Pfluegl

Pendar Technologies LLC

tel.: (857) 413-9339

www.pendartechnologies.com



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