[labnetwork] heat load of MA6 mask aligner and Oxford RIE 80
Perry M.G.
M.G.Perry at soton.ac.uk
Fri Mar 1 16:15:19 EST 2019
(unless spec includes pump!)
________________________________
From: Perry M.G.
Sent: 01 March 2019 21:13:44
To: Christian Pfluegl; labnetwork at mtl.mit.edu
Subject: Re: heat load of MA6 mask aligner and Oxford RIE 80
Hi Christian,
Can you confirm age of RIE? At idle the PLC is the thing that kicks out the most heat. There's no other idle heat load i can think of and 1.5kw does seem a lot.
regards
Mike
________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Christian Pfluegl <pfluegl at pendar.tech>
Sent: 01 March 2019 15:01:04
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] heat load of MA6 mask aligner and Oxford RIE 80
Dear colleagues,
We are planning to setup a Karl Suess MA6 maskaligner and a small Oxford RIE 80 in our facility.
Does anyone know what the heat loads of those systems are (both idling and operating)?
The Oxford manual says 1.5kW when idling but I am not sure how they arrive at such a high value when the RF is off.
Thanks,
Christian
Dr. Christian Pfluegl
Pendar Technologies LLC
tel.: (857) 413-9339
www.pendartechnologies.com
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